AGP4000 MEMS High-precision Digital Display Cold Cathode Composite Vacuum Gauge Pirani Vacuum Gauge

Uses:

• Semiconductor Manufacturing: It is used for precise monitoring of the vacuum environment in semiconductor manufacturing processes, such as semiconductor coating. Accurate vacuum degree control is crucial for the quality and performance of semiconductor products, and AGP4000 can provide reliable vacuum data to ensure the stability of the process.
• Aerospace Field: In aerospace component testing and other scenarios, it is necessary to simulate different vacuum environments to test the performance of components. AGP4000 can realize full - range monitoring from low vacuum to high vacuum, providing important data support for aerospace research and development and testing.
• Precision Scientific Research: In precision scientific research, such as some physical and chemical experiments requiring high - precision vacuum environment control, AGP4000 can help researchers accurately obtain vacuum degree information, ensuring the accuracy and repeatability of experimental results.
• Vacuum Furnace Applications: For vacuum furnaces, different vacuum degrees are required in different process stages. AGP4000 can monitor the vacuum degree in the furnace in real - time, and cooperate with the control system to adjust the vacuum degree, so as to ensure the heat treatment quality of materials and the service life of the furnace.

Features:

• Wide - range and High - precision Measurement: It can achieve full - range precise monitoring from low vacuum to high vacuum (1×10⁻⁶Pa ~ 1×10⁵Pa), covering a wide range of 6 orders of magnitude, with a repeatability error of ≤±5%, and excellent long - term stability, providing a reliable data foundation for key processes.
• Dual - technology Intelligent Collaboration: The Pirani system works throughout the process, and when the vacuum degree is < 10 Pa, the cold - cathode system is automatically started without manual intervention, which completely solves the pain point of the range limitation of traditional equipment.
• Strong and Durable: The cold - cathode design does not require a heating filament, which has strong anti - pollution ability, greatly extends the service life, and reduces the maintenance cost.
• True - color Visualization: It is equipped with a high - definition TFT - LCD color screen, which can dynamically display the pressure value in real - time, and can switch between three units (Pa/Torr/mbar) with one key, and also display temperature, communication status and high - voltage on - off marks (red/blue two - color warning), so that the data is clear at a glance.
• Dual - mode Output: It has a 0~10V linear analog signal, which can be directly connected to industrial equipment such as PLCs and recorders, and supports logarithmic conversion formulas, making it easy to adapt to the system. At the same time, it has a standard Modbus RTU protocol, which realizes RS485 communication through the RJ45 interface, supports multi - device networking, and is compatible with mainstream industrial control systems, helping to build an intelligent vacuum monitoring network.
• Simple Installation and Reliable Operation: It is standard - equipped with a KF25 stainless steel electro - polished flange, which has excellent airtightness and supports installation in any direction (vertical installation is recommended). It has a wide - voltage power supply (15~30V DC) and a power consumption of ≤6W, which can adapt to harsh industrial environments.
• Intelligent Calibration and Convenient Operation: It has a three - level menu - based interface design, supports Chinese and English switching, can set communication parameters and units on - site, perform 0.1Pa/atmospheric pressure calibration, and even restore the factory settings with one key, which greatly reduces the operation and maintenance threshold.

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